Abstract o5s6$\"  
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. k";dK*hD,  
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Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) ^!S4?<v  
Correspondence Name and Address:     SUGHRUE MION, PLLC "j_iq"J  
  2100 PENNSYLVANIA AVENUE, N.W. 6#U~>r/  
  SUITE 800 >;4q  
  WASHINGTON u9f^wn  
  DC I4N7wnBp  
  20037 ?IAu,s*u  
  US `e,}7zGR  
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Assignee Name and Adress: CARL ZEISS SMT AG `$f`55e  
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Serial No.: 931051 VkJ">0k  
Series Code: 10 ^}~Q(ji7  
Filed: September 1, 2004 ?sQg{1"Zr  
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U.S. Current Class: 359/649 clU ?bF~e1  
U.S. Class at Publication: 359/649 W~mo*EJ'^  
Intern'l Class: G02B 003/00; G02B 009/00 $Xwk8<  
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