Abstract !VpoZ  
Refractive projection objective with a numerical aperture greater than 0.7, consisting of a first convexity, a second convexity, and a waist arranged between the two convexities. The first convexity has a maximum diameter denoted by D1, and the second convexity has a maximum diameter denoted by D2, and 0.8<D.sub.1/D.sub.2<1.1. wd6owr  
-------------------------------------------------------------------------------- dh\P4  
Inventors: Rostalski, Hans-Juergen; (Berlin, DE) ; Schuster, Karl-Heinz; (Koenigsbronn, DE) ; Hudyma, Russell; (San Ramon, CA) ; Ulrich, Wilhelm; (Aalen, DE) ; Freimann, Rolf; (Aalen, DE) hbn([+xY  
Correspondence Name and Address:     SUGHRUE MION, PLLC j<$2hiI/?&  
  2100 PENNSYLVANIA AVENUE, N.W. jEwIn1  
  SUITE 800 ;*J  
  WASHINGTON F'Z,]b'st3  
  DC AXB7oV,xt  
  20037 p ll)Y  
  US Qb%J8juRf  
"N#Y gSr  
Assignee Name and Adress: CARL ZEISS SMT AG 9YGY,sx  
;VK.2^jW!  
Serial No.: 931051 wC*X4 '  
Series Code: 10 <3 uNl  
Filed: September 1, 2004 X3& Jb2c2  
05R@7[GWq  
U.S. Current Class: 359/649 EM_d8o)`B  
U.S. Class at Publication: 359/649 CJyevMf'  
Intern'l Class: G02B 003/00; G02B 009/00 A@'OJRc