SYNOPSYS中
光柵表面輸入格式:
K?*p|&Fi?8 SN GRATING {X/Y} L/MM ORDER CWAV HIN VNUM ;!)gjiapw 其中,X-衍射發(fā)生在X-Z平面;Y-衍射發(fā)生在Y-Z平面。L/MM-給出了光柵刻線數(shù);ORDER-衍射級(jí)次;CWAV-波長(zhǎng);HIN-基底
折射率;
ebhV;Q. VNUM-相應(yīng)的阿貝數(shù);
t]8nRZ1 'k/:3?R 例子:
`Af5%m[ RLE
r;GAQH}j_ ID GRATING_REAL FLAT
L@`:mK+; WAVL .6000000 .5000000 .4000000
/hAy1V6 APS 1
%:\GYs(Y POLARIZATION LINEAR Y
cRP!O|I`] UNITS MM
pI(
H7 ( OBB 0.000000 10.00000 1.00000 0.00000 0.00000 0.00000 1.00000
[midNC