Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309  |Next Article|  |Table of Contents| r$1Qf}J3=  
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Design and Fabrication of Highly Efficient Fan-Out Elements hM{bavd  
H. P. Herzig, D. Prongué and R. Dändliker #R"*c hLV  
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Institute of Microtechnology, University of Neuchâtel M+>u/fldV  
(Received March 26, 1990; accepted for publication May 19, 1990) 3mgD(,(^  
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鏈接:http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307