Jpn. J. Appl. Phys. 29 (1990) pp. L1307-L1309  |Next Article|  |Table of Contents| \=
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Design and Fabrication of Highly Efficient Fan-Out Elements ^EC)~HP@C  
H. P. Herzig, D. Prongué and R. Dändliker W?"2;](  
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Institute of Microtechnology, University of Neuchâtel E~<(i':  
(Received March 26, 1990; accepted for publication May 19, 1990) ~}7$uW0ol  
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鏈接:http://jjap.ipap.jp/cgi-bin/getarticle?magazine=JJAP&volume=29&page=L1307