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納米制造基礎(chǔ)及應(yīng)用” Nanofabrication - Fundamentals & Applications
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V$s]U .o]vjNrd/ 目錄:
vAy`8Q #?@k=e\ "c\ZUx_i6 Chapter 1 Atom, Molecule, and Nanocluster Manipulations
$f7#p4;}( for Nanostructure Fabrication Using Scanning
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!Mfz* Probe Microscopy 1
7;dV]N A. A. Tseng, S. D. Sartale, M. F. Luo, and C. C. Kuo
DQ?'f@I&* Chapter 2 Atomic Force Microscope Lithography 33
@-NdgM< N. Kawasegi, D. W. Lee, N. Morita, and J. W. Park
#c5G"^)z Chapter 3 Scanning Probe Arrays for Nanoscale Imaging,
'%. lY9D Sensing, and Modification 65
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9JU C. Santschi, J. Polesel-Maris, J. Brugger,
`jSxq66L p and H. Heinzelmann
)|x)KY Chapter 4 Using Biomolecules for Self-Assembly of Engineered
'&I.w p`^ Nano-Scale Structures and Devices 127
RnE=T/VZJ R. Mehta, J. Lund, and B. A. Parviz
d(jd{L4d Chapter 5 Nanofabrication Based on Self-Assembled
Eyxw.,rB/ Alumina Templates 159
Egi<m S. Sen and N. A. Kouklin
JpvE c!cli Chapter 6 Nanowire Assembly and Integration 187
w6F4o;<PR Z. Gu and D. H. Gracias
V)mRG`L Chapter 7 Taper-Drawing Fabrication of Glass Nanowires 213
w`bojM@e1 L. Tong and E. Mazur
'gxSHqeI2 Chapter 8 Extreme Ultraviolet Lithography 235
fLa 7d?4 H. Kinoshita
;dPyhR Chapter 9 Electron Projection Lithography 285
r{pTMcDS T. Miura, K. Suzuki, H. Arimoto, and S. Kawata
I8d#AVF2 Chapter 10 Electron Beam Direct Writing 341
9KN75<n K. Yamazaki
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@e-< Chapter 11 Electron Beam Induced Deposition 377
}oIA*:5 K. Mitsuishi
'JsP9>) Chapter 12 High-Resolution Electron-Beam-Induced Deposition 399
w^s|YF=c P. A. Crozier and C. W. Hagen
V:4]]z L} Chapter 13 Focused Ion Beams and Interaction with Solids 431
p~Fc*g[! T. Ishitani, T. Ohnishi, and T. Yaguchi
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