電子廠女工xp |
2024-05-14 08:52 |
Measuring the angles and pyramidal error of high-precision prisms
Measuring the angles and pyramidal error of high-precision prisms u&-Zh@;Q7 8n'"RaLQ8 High-precision prisms, having maximum angle tolerances XLq%nVBM8\ of 1 to 3 arcsec, find increasing application in optical metrology. }<=4A\LZ Reported interferometric techniques for measuring C]01(UoSZ the wedge angles of such prisms achieve a precision of up UB9n7L(@c to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques N3U.62 have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric ?7k%4~H t methods have made use of goniometers,2 5J
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