| kmischina |
2010-03-05 16:38 |
斷層面計(jì)測(cè)系統(tǒng)
Layer Profiling System t$18h2yOL
The layer profiling system performs layer structural by generating tomographic images of specified cutting location from potical microscope images that are obtained by moving sequentially in the vertical direction. |QDoi[
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Features ( Jk& U8y
Super depty measurement .9 r YBy
A Ryoka Linnik interference objective lens equipped with an optical path compensation plate insertion mechanism allows measurement of the layer section under a transparent layer to a maximum depth 3 mm. This system is very useful for defect analysis after manufacturing of flat display panels such as plasma displays. /ce;-3+
Vevy weak interference fringe patterns can be capured
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