如果採用 Code V 軟體,那麼可以用 SAGF 函數(shù)計算面深(Sag)量:
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SAGF(surface_num, zoom_pos, x_coord, y_coord) - Sag of the designated surface at x_coord, y_coord d5w_[=9U
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如果想知道的是某一非球面的型狀是否能由干涉儀測量,那麼 Code V 提供兩個函數(shù): Pg*?[^*
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(1) 使用 Zygo 干涉儀 Zzw}sZ?8
函數(shù) @VFA(zoom #, surface #, height) d{iu+=NXz
Surface is testable for @VFA < 1.0 f"ZqA'KB#
Surface is not testable for @VFA > 1.0 dT0^-XSY
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(2)使用 QED 干涉儀 v5&xY2RI7
函數(shù) @SSIa(surface #, zoom #, height) $n=W2WJ6f
0 <= @SSIa < 0.5 - surface is readily testable ]/aRc=Gn
0.5 <= @SSIa < 1 - surface is marginally testable P|unUW(P
@SSIa >= 1 - surface is difficult to test