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    [論文]Measuring the angles and pyramidal error of high-precision prisms [復(fù)制鏈接]

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    只看樓主 倒序閱讀 樓主  發(fā)表于: 2024-05-14
    Measuring the angles and pyramidal error of high-precision prisms 3Jk[/ .h  
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    High-precision prisms, having maximum angle tolerances )2xE z  
    of 1 to 3 arcsec, find increasing application in optical metrology. GL1'Zo  
    Reported interferometric techniques for measuring kw*)/$5]  
    the wedge angles of such prisms achieve a precision of up P?kx  
    to 0.1 arcsec ~Ref. 1!, while noninterferometric techniques &5?G-mn  
    have a precision of up to 2 arcsec ~Ref. 2!. Reported noninterferometric AXs=1  e  
    methods have made use of goniometers,2 >R!"P[*  
    spectrometers,3 master prisms,4,5 and collimators.6 However, 3UdU"d[75  
    in the literature there are few reported methods for Q]@c&*